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R2 Energy, Inc

R2 Energy, Inc. World Class Innovators with Over 25 Years Experience in Green Energy Technology.

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R2 Energy, Inc

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  1. R2 Energy, Inc World Class Innovators with Over 25 Years Experience in Green Energy Technology The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  2. Veeco FastLine Concept Review01/31/2011 The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  3. Project Scope • The common chamber module shall be used as the platform to create functionally specific chamber modules by configuring different hardware to it. • The chamber module configurations that will be created using this common chamber module are: entry load lock, buffer, heat-up/anneal, cool-down #1, cool-down #2/3 and exit load lock chamber. • The common chamber module shall be designed to include most, if not all of its subsystems, integrated and functional as a stand alone testable product. The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  4. Module Design • Shall consist of a vacuum chamber, vacuum pump(s), vacuum system components, frame, transport system, heater(s), I/O, water cooling and pneumatic systems. • Water distribution for all components contained within the module. • Siemens S7 PLC I/O control module for all components contained within the module. • SMC pneumatic control solenoid bank for all components contained within the module. • No duct directly above machine. All ducts mounted above or underneath catwalk. • All controls and displays can be seen and read in upright position, no need to remove parts or to crawl into or under the equipment whenever possible. • Water ducts are always in lowest position always positioned below electrical ducts The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  5. Module Design The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  6. Overall Layout Loadlock Buffer Heat 1 Heat 2 Heat 3 Anneal Cool 1 Cool 2 Cool 3 Loadlock The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  7. Overall Layout The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  8. Stand Design • Frame constructed from 4” carbon steel box tube and powder coated. • Support frame with provisions for standard fork lift forks and load pads/feet including slide plates to allow for potential thermal expansion of the chambers. • Frame shall sit on the load distributing pad and slide plate that have >2.5cm of level and height adjustment • Shall interface to the load module on the glass entry side and the buffer module on the glass exit side The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  9. Stand Structural Analysis Estimated Weight: Chamber + Stand = 6000 lbf Lid Weight = 2100 lbf Chamber Without Lid = 3900 lbf All Safety Factors based on Yield Strength of Plain Carbon Steel - 32,000 psi The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  10. Stand Structural Analysis Closed Lid Condition With Truss Members 9050 psi Worst Case Stress (3.54 SF) Stand Feet - Jam Nut Area – 5/8 dia thread 0.002 in Worst Case Displacement Front and Back Chamber Support/Frame Interface Without Truss Members 9390 Worst Case Stress (3.41 SF) Stand Feet - Jam Nut Area 0.008 in Worst Case Displacement Front and Back Chamber Support/Frame Interface The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  11. Stand Structural Analysis Closed Lid Stress – With Truss Members The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  12. Stand Structural Analysis Worst Case Stress Area – Jam Nut Interface The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  13. Stand Structural Analysis Closed Lid Displacement – With Truss Members The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  14. Stand Structural Analysis Closed Lid Stress – Without Truss Members The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  15. Stand Structural Analysis Closed Lid Displacement – Without Truss Members The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  16. Stand Structural Analysis Open Lid Condition With Truss Members 12,340 psi Worst Case Stress (2.59 SF) Stand Feet - Jam Nut Area – Near Open Cover 0.003 in Worst Case Displacement Center Rear Chamber Support/Frame Interface Without Truss Members 13,620 psi Worst Case Stress (2.35 SF) Stand Feet - Jam Nut Area - Near Open Cover 0.012 in Worst Case Displacement Center Rear Chamber Support/Frame Interface The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  17. Stand Structural Analysis Open Lid Stress – With Truss Members The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  18. Stand Structural Analysis Open Lid Displacement – With Truss Members The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  19. Stand Structural Analysis Open Lid Stress – Without Truss Members The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  20. Stand Structural Analysis Open Lid Displacement – Without Truss Members The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  21. Chamber Design Heater Feed-thrus • 304 stainless steel welded vacuum housing with approximate dimensions of 1800 L X 1500 W X 400mm H. • Pyrometer ports looking at the top surface of the molybdenum coated glass substrate at three positions with located at the center and 20mm each edge. Pyrometer window material shall be high temperature (>300 deg. C rated) borosilicate glass. • Nitrogen venting system interface • Roughing vacuum and venting ports shall be located on the bottom of the vacuum chamber. Roughing Port Water Trace Port for Turbo Pump The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  22. Chamber Design • Vacuum chamber to include standard ISO-KF or Conflat ports for connections to pressure sensors, roughing valves, relief valves, vent assemblies, RGA port and vacuum leak check equipment • External housing shall have a maximum surface temperature of 50 deg. C with all heaters at full power and water flow rates at nominal flow conditions using 18 deg. C water inlet temperatures • All required ports are provided for high vacuum, rough pumping, and instrumentation. • NO ALUMINUM ALLOWED INSIDE THE VACUUM ENVIRONMENT • Acceptable materials of construction include but are not limited to: 300 Series Stainless Steel, 17-4 Stainless Steel, Vespel, Cast Acrylic (Plexiglas, Acrylite), Polycarbonate (Lexan), Torlon, Polyurethane, Fluorocarbon (Viton), Perfluoroelestomer (Kalrez, Chemraz). The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  23. Chamber Design • The chambers are water cooled, 304 SS with removable lids. • The external & internal surface finishes to be No#4 Satin Polish finish. • All flanging is ISO, DIN standard or Conflat type. • All o-ring seals to be Viton. • All parts should be designed to minimize particle generation. • Surfaces should be smooth (e.g., no snags, pitting) before finish application. All surfaces should be protected against corrosion as applicable. • Typical areas that should be considered are access space, lifting weights, serviceable components shall be replaced as modular components, serviceable components shall be independently accessible (not stacked), cables and connectors shall be labeled or configured to prevent cross connection. The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  24. Chamber Structural Analysis • Vacuum chambers to operate over the pressure range from 10 Torr over ambient atmospheric pressure (~770 Torr) to high vacuum pressure (>1.0E-7 Torr). • Vacuum chamber to be designed to remain at a high vacuum pressure level (1.0E-7 Torr). Vacuum pressure level to be sensed and maintained by process chamber vacuum control system. • Model ran with -15 psi applied to all internal surfaces. • Max deflection of .026” across center support rib of triple rib design. • Max deflection of .002” across drive rollers of triple rib design. • Worst case stress, 26,000 psi, 304 SS yield ≈ 31, 200 psi, SF=1.2 The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  25. Chamber Structural Analysis The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  26. Chamber Structural Analysis The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  27. Chamber Structural Analysis The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  28. Drive System Concept • Transport system with all drive mechanisms in atmosphere utilizing water cooled ferrofluidic dynamic vacuum seals in the heating chambers. • Transport system in vacuum shall support the carrier only on the edges with a means to keep the carrier centered. • The carrier shall be driven on both sides. • Transport height shall be 1 to 1.5m from the floor. • All connects for fast remove whenever possible. • Shall be capable of handling 120cm +/-2mm wide (leading edge) X 2 to 4mm (3mm standard) thick glass substrates on a carrier. • All parts should be designed to minimize particle generation. • Surfaces should be smooth (e.g., no snags, pitting) before finish application. All surfaces should be protected against corrosion as applicable. The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  29. Drive System Concept • Linear velocity of 10 - 50 cm/min (normal operation during deposition), 100 cm/min (maximum); utilizing S-curve acceleration profiles with a max acceleration value of 1m/s^2 & 50% jerk. • Linear velocity of 20cm/sec during load and unload into/out of the load lock; utilizing S-curve acceleration profiles with a max acceleration value of 1m/s^2 & 50% jerk. • Shall use a roller transport system with all mechanisms in atmosphere. • The carrier shall be supported by a minimum of 4 roller on each side (total of 8) at all times. • Component assemblies should be designed to eliminate the rubbing together of parts that generate contamination. (7) 1” Timing Belts Rigaku Ferrofluidic Feed-thru Siemen’s Servo Motor The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  30. Drive System Concept • Shall have a dedicated motion PLC used solely for the control of the transport system • Motor drive/amplifier and controller that is offered by the same supplier as the machine PLC is preferred • Approved commercial suppliers/ components • PLC Siemens S7 SPS • I/O Siemens • Motion control Siemens • Motor drive Siemens • Motors Siemens • Shall interface using Profibus to other PLC’s. • Shall control and coordinate the operation of all the transport motors and drives. • Redundant transport sensors to sense the position of the carrier/substrate as it is entering and exiting the module.. The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  31. Heater System Concept • Segmented cassette type resistive heater modules with CFC or stainless steel front and back sheets with multiple zones. • All heaters shall be easily removed and replaced in < 1hour by 2 skilled people (not including venting, cool down or pump down times). • Individual segment thermocouples in stainless steel sheaths • Two temperature sensing thermocouples. One used for control and a second used for a redundant backup and over temperature monitoring. • Heaters shall be located above and below the substrate • All electrical connections shall be made in atmosphere • Heaters shall be a integrated subassembly that can be installed and removed as a single unit • All connects for fast remove. The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  32. Heater System Concept • The structure used to mechanically contain the heating element shall be formed from stainless steel and allow for thermal growth of the element without impacting any forces from the heating element to the structure. • Shall be supported by pin and clevis type mechanical connections that allow for thermal growth. • Internal chamber mounting using pins and retaining clips (E-clips & cotter pins) preferred for non-structural mounting. • Minimize use of threaded fasteners for ease of maintenance robustness to corrosive effects of Selenium over time, particularly in chamber directly adjacent to process modules. • Any sheet metal shields that are used in a vacuum environment shall be “vacuum dead annealed” to >1000 deg. C for 24 hours under load prior to forming or fabrication. Loose pin or rod mounting to allow for thermal growth and height adjustment Typical sheet metal construction. Four zone heater weighs approximately 50 lbs. The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  33. Entry/ Buffer Heater System Concept Zone 3 • The same heater assemblies shall be used in the load lock module and the buffer module. • Each heater assembly shall have a nominal overall dimension of 1300mm wide X 850mm long X <50mm tall. • Each heater assembly to have four zones • Power density of zone 1 shall be 2 W/cm2 (3.5 W/cm2) • Power density of zone 2 shall be 2 W/cm2 (3.5 W/cm2) • Power density of zone 3 shall be 1.8 W/cm2 (2.8 W/cm2) • Power density of zone 4 shall be 2 W/cm2 (3.5 W/cm2) • Zone configuration and nominal sizes are shown below: • Zone 1: 150mm X 1000mm • Zone 2: 150mm X 850mm • Zone 3: 700mm X 1000mm • Zone 4: 150mm X 850mm Zone 4 Zone 1 Zone 2 The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  34. Entry/ Buffer Heater System Concept Zone 3 • The load lock heater assemblies shall have a temperature of the surface facing the substrate of 250 degrees C, with a temperature uniformity of <+/-5 degrees C across the entire surface. • The buffer heater assemblies shall have a temperature of the surface facing the substrate of 400 degrees C, with a temperature uniformity of <+/-5 degrees C across the entire surface. • The following heater zones can be controlled together, i.e., does not require independent control. • LENH-Zone 1 & LEXH-Zone 1 • UENH-Zone 1 & UENH-Zone 1 • LENH-Zone 2 & LENH-Zone 4 • LEXH-Zone 2 & LEXH-Z one 4 • UENH-Zone 2 & UENH-Zone 4 • UEXH-Zone 2 & UEXH-Zone 4 • LENH-Zone 3 & LEXH-Zone 3 • UENH-Zone 3 & UEXH- one 3 Zone 4 Zone 1 Zone 2 The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  35. Heat up/Anneal Heater System Concept • The heat-up and anneal heater assemblies shall have a temperature of the surface facing the substrate of 650 degrees C, with a temperature uniformity of <+/-5 degrees C across the entire surface • Each heater assembly shall have a nominal overall dimension of 1300mm wide X 850mm long X <50mm tall. • Each heater assembly to have three zones. • Power density of zone 1 shall be 4 W/cm2 • Power density of zone 2 shall be 2.4 W/cm2 • Power density of zone 3 shall be 4 W/cm2 • Zone configuration and nominal sizes are shown below: • Zone 1: 150mm X 850mm • Zone 2: 1000mm X 850mm • Zone 3: 150mm X 850mm Zone 3 Zone 1 Zone 2 The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  36. Heat up/Anneal Heater System Concept • The following heater zones can be controlled together, i.e., does not require independent control. • LENH-Zone 2 & LEXH-Zone 2 • UENH-Zone 2 & UEXH-Zone 2 • LENH-Zone 1 & LENH-Zone 3 • LEXH-Zone 1 & LEXH-Z one 3 • UENH-Zone 1 & UENH-Zone 3 • UEXH-Zone 1 & UEXH-Zone 3 • The upper exit heater assembly shall have three ~40mm (actual diameter is TBD) diameter through holes for the purpose of having a line of sight to the substrate for pyrometer temperature measures. • The three holes shall be centered to the glass centerline along the axis of motion. • The two outer holes shall be positioned at a dimension of +/-570mm from the center of the glass/heater. Zone 3 Zone 1 Zone 2 The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  37. Module Edge Heater System Concept • Shall be used to maintain temperature of the carrier and substrate as it moves from one chamber to the next. • Shall consist of two heater assemblies mounted below the substrate: one at the chamber entrance and one at the chamber exit (i.e., on either side of the main chamber module heater). • Each heater assembly shall have a nominal overall dimension of 1300mm wide X 125mm long X <50mm tall. Length shall depend on the overall interior chamber dimension. • Each heater assembly to have one zone with a power density of 4 W/cm2 • The chamber edge heater assemblies shall have a temperature of the surface facing the substrate of 650 degrees C, with a temperature uniformity of <+/-5 degrees C across the entire surface. • The following heater zones can be controlled together, i.e., does not require independent control. • LENH & LEXH • UENH & UENH The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  38. Heater System Examples The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  39. Vacuum System Concept • Shall have a ISO 100 interface for rough vacuum • Shall be capable of a pump down time from atmosphere to 200mT in 30 seconds (Loadlock) • Shall be capable of a vent up time from 200mT to atmosphere in 15 seconds. • A 3200 l/s turbo-molecular pump mounted to the bottom side of the chamber (no isolation valve to be used) on a right angle manifold or on the side of the chamber (if it fits) utilizing a screen for pump protection. Pump shall be bolt on type with through-hole mounting. • Shall be capable of a pump down time from 200mT to 5E-6Torr 150 seconds (Buffer) • Shall be capable of a pump down time from atmosphere to 200mT in 40 seconds. (Exit) • Shall be capable of a pump down time from 200mT to 5E-5 T in 60 seconds. • Shall be capable of a vent up time from 5E-5 T to atmosphere in 30 seconds. • Veeco and R2 are both currently working directly with Leybold on pumping times and manifold design. The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  40. Vacuum System Concept The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  41. Lid Opening Concept • 304 stainless steel top lid with lifting points integrated to the structural gussets • Lid lift mechanism located in atmosphere shall be either hinged (and motor driven with safety stops) or can be removed (by crane) completely. • Lid open and close position switches. • Lid lift mechanism shall be protected from over travel in the OPEN and CLOSED position • A means to align the transport system of this module to the adjacent one(s) to within +/-0.25mm. • All latching mechanisms, hinges and fasteners should be designed to minimize particulate generation. • Components should be of industrial grade quality and designed with consideration for prolonged manufacturing use. • All surfaces should be non-shedding, non-porous and not easily scuffed, scraped, chipped or worn during anticipated use. • “O” ring surfaces will be 32 RMS with ½ dovetail and external notch for removal. The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  42. Lid Opening Concept The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  43. Lid Opening Structural Analysis Worst Case Stress on Catwalk Frame: 19,300 psi – Jam Nut Area at 32000 Yield Strength - 1.66 Safety Factor Worst Case Displacement 0.06 in – top surface – lateral toward rear The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  44. Lid Opening Structural Analysis Overall Frame Stress The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  45. Lid Opening Structural Analysis Stress – Jam Nut Area The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  46. Lid Opening Structural Analysis Overall Frame Displacement The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  47. VAT Valves • VAT atmospheric isolation slit valve. • VAT high vacuum isolation slit valve. • The slit valves shall be sized to allow the substrate and carrier to pas through with at least 25mm of clearance all around. • Time to open or close atmospheric isolation valve < 3 second per actuation. • Time to open or close vacuum isolation valve < 3 second per actuation. • When isolation chamber is open to high vacuum environment, leakage through the atmospheric isolation valve from atmospheric environment to the isolation chamber shall be < 1.0e-9 atm.-cc sec-1. • When isolation chamber is open to ambient environment, leakage through vacuum isolation valve to high vacuum environment shall be < 1.0e-9 atm.-cc sec-1. The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

  48. R2 Energy, Inc World Class Innovators with Over 25 Years Experience in Green Energy Technology The information being disclosed is deemed to be proprietary and is the property of R2 Energy, Inc. Possession of this information does not convey any permission to reproduce, print or manufacture without specific written authorization.

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