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Kensington Pre Aligners have a long history of operation in semiconductor wafer fabrication. Several configurations of wafer aligners are available that support wafer sizes from 50 mm to 300 mm. The pre aligner technology is available in stand-alone units as well as integrated directly into robots.
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Pre-Aligners Both integrated and external prealigners use transmissive sensors located within the prealigner to sense the wafer’s edge and accurately measure orientation during a single rotation. They accurately detect any combination of SEMI standard wafer alignment features. location and External Our external prealigner is designed to mount inside the front end of the tool. It provides high throughput, up to 450 wafers per hour, while maintaining cleanliness, accuracy, and reliability. It also allows our edge grip and transmissive equipped robots to perform an automated one-step self teach. 125mm 150mm 200mm < 2 arc sec < 0.002 inch (0.051mm) sensor Wafer Sizes Rotational Accuracy Centration Accuracy 100mm 300mm External Small Wafer Our external small wafer prealigner is designed to mount inside the front end of the tool. It provides high throughput, up to 450 wafers per hour, while maintaining cleanliness, accuracy, and reliability. ` Wafer Sizes Rotational Accuracy Centration Accuracy 50mm 75mm 100mm < 2 arc sec < 0.002 inch (0.051mm)
Integrated The integrated prealigner is designed to mount on the shoulder of the robot, minimizing the footprint of the robot and prealigner system and maximizing cleanliness, accuracy, and reliability. Wafer Sizes 125mm 150mm Rotational Accuracy Centration Accuracy 200mm < 2 arc sec and 300mm < 0.002 inch (0.051mm) Contact Us Kensington Laboratories, LLC 30974 Santana Street Hayward, CA 94544 Phone: 510.324.0126 Fax: 510.324.0130 www.kensingtonlabs.com
