'High etch selectivity' presentation slideshows

Material removal: etching processes

2.06k views • 43 slides

Etching Diffusion & Ion Implantation

Etching Diffusion & Ion Implantation. 1. Instructor Abu Syed Md. Jannatul Islam Lecturer, Dept. of EEE, KUET, BD. Department of Electrical and Electronic Engineering Khulna University of Engineering & Technology Khulna-9203. Etching. 2.

616 views • 43 slides

Chapter 10 Etching

Chapter 10 Etching. Introduction to etching. Wet chemical etching: isotropic. Anisotropic etching of crystalline Si. Dry etching overview. Plasma etching mechanism. Types of plasma etch system. Dry etching issues. Dry etching method for various films.

1.86k views • 42 slides

Chapter 10 Etching

Chapter 10 Etching. Introduction to etching. Wet chemical etching: isotropic. Anisotropic etching of crystalline Si. Dry etching overview. Plasma etching mechanism. Types of plasma etch system. Dry etching issues. Dry etching method for various films.

2.34k views • 42 slides

University of Wisconsin-Madison NSEC: Templated Synthesis and Assembly at the Nanoscale

Etching Amount (nm). Etching Time (s). Thrust 1: Direct Patternable Organic-Inorganic Hybrid Block Copolymer Template T. Hirai, M. Leolukman , C.C. Liu, E. Han, Y.J. Kim, Y. Ishida, T. Hayakawa, M.-A. Kakimoto , P.F. Nealey , P. Gopalan. (a). (b). PMMA- b -PMAPOSS.

80 views • 1 slides