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Three Dimensional Integrated Circuits

Three Dimensional Integrated Circuits. C.S. Tan, A. Fan, K.N. Chen, S. Das, N. Checka and R. Reif Microsystems Technology Laboratories M.I.T. 3-D Integrated Circuits (3-D IC) A vertical stack of multiple device and interconnect layers connected together by interlayer vertical vias.

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Three Dimensional Integrated Circuits