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Typical 193 nm resist - PowerPoint PPT Presentation

(6.1)

PAG Exposure:. (6.1). Deprotection:. (6.5). Figure 6.1. Examples of 248-nm blocking groups: the high activation t-butyl ester; and the low activation acetal. Figure 6.2. The 1D reaction ? diffusion point spread function ( RDPSF ) and its component terms. (a). (b).

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Typical 193 nm resist - PowerPoint PPT Presentation

(6.1)