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Si-gas sensors: new generation and method

Si-gas sensors: new generation and method. A.A. Chapkevich “Flicker-Test” LLC. Si-gas sensor’s design. Electrical-fluctuation’s performances. 0,8    1,2. N = nWLt. 1-Power supply, 2-Magneto-electric inlet valve, 3-Vacuum gauge, 4-Gas pumping control, 5-Temperature control,

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Si-gas sensors: new generation and method

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  1. Si-gas sensors: new generation and method A.A. Chapkevich “Flicker-Test” LLC

  2. Si-gas sensor’s design

  3. Electrical-fluctuation’s performances 0,8  1,2 N = nWLt

  4. 1-Power supply, 2-Magneto-electric inlet valve, 3-Vacuum gauge, 4-Gas pumping control, 5-Temperature control, 6-Data processing unit, 7-AD converter, 8- Preevacuation pump, 9-Turbo-molecular pump, 10-Exhausted measurement chamber, 11-Gas sensor, 12-Charge-sensing booster, 13-Temperature gauge, 14-LED, 15-LED control 16-Peltier element 17-Q-pole Gas-sensor’s test unit (block design)

  5. Typical Si-gas sensor’s electrical fluctuation response (spectrum density) Heptan (C7H16) (Shep/Sins) (F=4,5e-5 Тоrrl/s) Т=273K

  6. Magnification of the spectral density signal response under influence of the vapors (С7Н16and C8H18) T=268K T=273K

  7. Identification software model

  8. Temperature depending bar code calculation for Heptan vapors

  9. Si-based Gas-sensors design • Si-planar • Si/SiO2/Si planar • Si flip-chip • Si/SiO2/Si flip-chip • Si/SiO2/Si flip-chip (limited)

  10. Prototypes of Gas-analyzers

  11. Patents

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