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Atom Probe Tomography 3-D atomic scale chemical maps Sharp tip ( pcrepared by FIB or etching)

Atom Probe Tomography of Advanced GaN -based LEDs James Speck, University of California-Santa Barbara, DMR 0821168. Atom Probe Tomography 3-D atomic scale chemical maps Sharp tip ( pcrepared by FIB or etching) DC E-field + laser pulse (or E-pulse) Atom position via position on detector

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Atom Probe Tomography 3-D atomic scale chemical maps Sharp tip ( pcrepared by FIB or etching)

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  1. Atom Probe Tomography of Advanced GaN-based LEDsJames Speck, University of California-Santa Barbara, DMR 0821168 • Atom Probe Tomography • 3-D atomic scale chemical maps • Sharp tip (pcrepared by FIB or etching) • DC E-field + laser pulse (or E-pulse) • Atom position via position on detector • Atom nature via flight time Atom probe reconstruction: GaN LED Recorded at UCSB on Imago HR 3000 LEAP atom probe m-plane, non-polar LED - 60 million atom data set (left to right) GaN:Si/6X InxGa1-x N/GaN QW/AlyGa1-yN/GaN:Mg • Key results • Homogeneous InxGa1-x N quantum wells • Mg clustering in GaN:Mg layer • Color code: • Ga+N: green; In: purple; Al: aqua; Mg: red

  2. Atom Probe Tomography of Advanced GaN-based LEDsJames Speck, University of California-Santa Barbara, DMR 0821168 Free surface In: purple; Al: aqua Note that the sample direction is reversed (free surface toward left in this image) • Detailed analysis of multiple quantum well (MQW) region • Chemically homogeous InxGa1-xN in the quantum wells • Abrupt lower and upper interface with additional evidence of floating In layer that • leads to additional indium incorporation in barrier layers • Broader Impact • Example of nanoscale chemical analysis with atomic scale, 3D resolution • Unparalleled resolution and dynamic range (from ~1017 cm-3 to bulk composition)

  3. Training ActivitiesJames Speck, University of California-Santa Barbara, DMR 0821168 • Ravi Shivaraman • M.S. in Materials Science (ASU) • 1+ year staff member at Imago Scientific • Temporary staff member – UCSB Microscopy and Microanalysis Facility • (Summer 2009) • Ph.D. student – UCSB Materials Department (current) • Nicholas Cunningham • MS in Mechanical Engineering (UCSB) • Ph.D student • Summer 2009 LEAP (atom probe) Training Sessions • 5 Participants • 6 Training Sessions • 8 Potential/Current Users

  4. International ActivitiesJames Speck, University of California-Santa Barbara, DMR 0821168 UCSB-Oxford-Leoben Collaboration Round-robin characterization of a reference advanced high temperature and radiation damage tolerant nano-dispersion-strengthened alloy with far from equilibrium nm scale Y-Ti-O precipitate clusters Excellent agreement between data from three laboratories

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