Designing a Compact High-precision Positioner with Large Stroke Capability
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A new design of a fine positioner or high precision driven unit with a large positioning range is proposed for a custom-made in-situ indenter device equipped inside an SEM chamber. The design configuration of the proposed system is size-effective for the confined working area of the SEM chamber. The indentation depths can be precisely varied by controlling the fine positioner driven by a piezoelectric actuator.
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Designing a Compact High-precision Positioner with Large Stroke Capability
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