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真空晨会报告

真空晨会报告. 2009-06-13. 目前真空系统状态. 内真空： 2 台主分子泵 +3CP ； 外真空： 2 台分子泵； 低杂波： 1 套分子泵机组； 目前烘烤： 感应烘烤： 0 内衬烘烤： 20 A 管道烘烤： 100 V. 主要工作. He GDC 05:20 - 07:00 0.6 Pa ， 2 A. 装置各处真空度演变. 内真空 质谱.

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真空晨会报告

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  1. 真空晨会报告 2009-06-13

  2. 目前真空系统状态 • 内真空：2台主分子泵+3CP； • 外真空：2台分子泵； • 低杂波：1套分子泵机组； • 目前烘烤： • 感应烘烤：0 • 内衬烘烤：20 A • 管道烘烤：100 V

  3. 主要工作 • He GDC • 05:20 - 07:00 • 0.6 Pa，2 A

  4. 装置各处真空度演变

  5. 内真空 质谱

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