Introduction to SECS/GEM: Communication Interface Protocols for Semiconductor

1. Introduction to SECS/GEM: Communication Interface Protocols for Semiconductor Equipment www.einnosys.com sales@einnosys.com

2. What is SECS/GEM? SECS (SEMI Equipment Communication Standard) and GEM (Generic Equipment Model) are communication interface communication between semiconductor equipment and a fabrication host system. The fab host, a software application used to control and monitor equipment, utilizes the SECS/GEM protocol to manage various processes. protocols designed to facilitate SECS/GEM-compliant equipment can communicate with the fab host using either TCP/IP (as defined by SEMI standards E37 and E37.1 – HSMS) or RS-232 (as defined by SEMI standard E4 – SECS-I). This protocol supports various functions, including starting and stopping equipment processing, collecting measurement data, selecting product recipes, and modifying variables. The SECS/GEM standard has been standardized by SEMI (Semiconductor International). For more information, visit SEMI. Equipment and Materials Key Components of SECS/GEM SECS (SEMI Equipment Communication Standard) Protocol and Message Formats: Defines the communication protocols and message formats between host systems and equipment. SECS-I and HSMS: Includes SECS-I (RS-232 based) and HSMS (High-Speed SECS Message Services, TCP/IP based). GEM (Generic Equipment Model) Standard Control and Monitoring: Provides a standardized method for controlling and monitoring semiconductor manufacturing equipment. Equipment Behavior: Defines a model for equipment behavior, status reporting, and data collection.

3. Applications of SECS/GEM Semiconductor Manufacturing Wafer Fabrication: Used extensively in wafer fabrication, testing, and packaging to ensure precise control and monitoring of complex processes. Electronics Manufacturing Component Production: Applied in the production of electronic components and assemblies, enhancing integration and automation. Pharmaceutical and Biotech Industries Compliance and Control: Utilized for equipment communication and control in the production of pharmaceuticals and biotechnology products, ensuring regulatory compliance and quality control. How Our SECS/GEM Standard Services Help 1. Communication SECS/GEM facilitates communication between equipment and the host system, managing the presence or absence of communication links. Our SECS/GEM software streamlines this process, enabling efficient communication. 2. Control Our eInnosys CONTROL state model outlines different levels of control between the host and equipment: OFFLINE: Manual operation by an operator with limited host interaction. LOCAL/ONLINE: Read-only operations by the host, with no changes to equipment constants or processing commands. ONLINE/REMOTE: Full remote control by the host, allowing comprehensive equipment management. 3. Processing The PROCESSING state model depends on the equipment's design and technology, though some characteristics are common across models. 4. Remote Command Instructions like START, STOP, and PAUSE can be given to the equipment from the host, mirroring manual operations.

4. 5. Different Variables Status Variable: Read-only global variable updated during processing. Equipment Constant: Global variable that can be read and modified, affecting equipment settings. Continuous Variable: Local variable present only during collection events. 6. Data Collection Status Variables: Request and collect values using the S1F3 command. Equipment Constants: Obtain values using the S2F13 command. Reports: Define and attach reports to collection events using S6F11 instruction. 7. Complete Documentation Each equipment supplier must provide a GEM Interface Reference Manual, including a list of supported variables, alarms, and events, along with a GEM Compliance declaration. 8. Alarm Notification Equipment can alert the host about alarms or faults, ensuring prompt attention to unusual events. Benefits of SECS/GEM Integration Improved Equipment Performance Real-time monitoring and control enhance equipment performance, reducing downtime and improving efficiency. Enhanced Data Collection and Analysis Comprehensive data collection and analysis lead to better decision-making, improved process quality, and reduced operational costs. Increased Automation and Efficiency Automation through SECS/GEM reduces manual intervention, speeds up production cycles, and increases throughput. Improved Equipment Utilization Real-time monitoring helps optimize production schedules and maximize equipment utilization. Enhanced Process Control Granular control over processes improves stability, reduces variability, and enhances product quality.

5. How to Implement SECS/GEM Integration Assessing Your Current Systems Evaluate your current systems to determine which equipment supports SECS/GEM and the integration requirements. Choosing the Right SECS/GEM Solution Select a SECS/GEM solution that meets your requirements, budget, and infrastructure. Consider ease of integration, scalability, and future support. Planning the Integration Process Develop a detailed plan for integration, including timelines, resources, and team training. Collaborate with vendors and experts to ensure smooth implementation. Testing and Validation Conduct thorough testing to verify functionality, communication accuracy, and data reliability. Address any issues promptly. Continuous Monitoring and Improvement Regularly review and update your SECS/GEM implementation to maintain optimal performance and reap long-term benefits. Equipment Used for Working on SEMI E30 Tools must implement a minimal subset of capabilities listed in the E30 standard to meet basic GEM requirements. eInnosys supports remote control, data publication, and complete process management, offering full compliance with SEMI E30 standards. SEMI Standards E30: Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) E5: Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II) E37: Specification for High-Speed SECS Message Services (HSMS) Generic Services E4: Specification for High-Speed SECS Message Services (HSMS) Generic Services

6. The SECS/GEM standard defines messages, state machines, and scenarios to enable factory host applications to control and monitor manufacturing equipment. The GEM standard, officially designated as SEMI standard E30, offers a common set of equipment behavior and communication capabilities, ensuring interoperability and flexibility in manufacturing. For more information on how our SECS/GEM solutions can benefit your operations, contact our sales team at sales@einnosys.com. SECS/GEM CONTACT US 1.805.334.0710 www.einnosys.com Sales@einnosys.com 5899 Remer Terrace, Fremont, CA 94555, USA einnosys