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Other methods of lithograply

Other methods of lithograply. Photolithography. Si structure. Other methods of lithograply. Pour PDMS over master Cure at 60 º C for ~1hour. PDMS. Si structure. PDMS. Other methods of lithograply. Peel off from Master. PDMS. Other methods of lithograply. Si structure. PMMA.

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Other methods of lithograply

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  1. Other methods of lithograply Photolithography Si structure

  2. Other methods of lithograply • Pour PDMS over master • Cure at 60 ºC for ~1hour PDMS Si structure

  3. PDMS Other methods of lithograply Peel off from Master PDMS

  4. Other methods of lithograply Si structure PMMA Si substrate

  5. Other methods of lithograply Si structure PMMA HEATING ABOVE Tg Si substrate

  6. Other methods of lithograply Apply pressure Si structure PMMA Si substrate

  7. Other methods of lithograply Apply pressure PMMA Si substrate

  8. Other methods of lithograply Apply pressure COOL BELOW Tg PMMA Si substrate

  9. Other methods of lithograply RELEASE New structure exactly opposite of stamp PMMA Si substrate

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