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ESD SYSTEM OVERVIEW

ESD SYSTEM OVERVIEW. Transport rod. 1. Cu Sample. Butterfly valve. 2. Bias Sample. Sample Holder plate. Electrometer. RGA. B-A gauge. Pumping group. Filament. Conductance. Gas Injection Line. Filament Power Supply. Full Range Gauge. Bias Filament . ESD SYSTEM OVERVIEW.

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ESD SYSTEM OVERVIEW

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  1. ESD SYSTEM OVERVIEW Transport rod 1 Cu Sample Butterfly valve 2 Bias Sample Sample Holder plate Electrometer RGA B-A gauge Pumping group Filament Conductance Gas Injection Line Filament Power Supply Full Range Gauge Bias Filament

  2. ESD SYSTEM OVERVIEW

  3. Cu SAMPLES

  4. Circuit 35 KV V 2-3 A A +15 V V A

  5. Cu Samples Heat treatment Machining Cleaning ESD main steps:   

  6. Bake – out: lower part 9 8 6/11 7 1 2 3 5 10 4

  7. Bake – out: upper part 3B 2B 4B 1B

  8. RGA scans

  9. RGA scans (valve closed)

  10. Degassing: 9 Cycles @ 0.35KV

  11. Degassing: 9 Cycles @ 0.70KV

  12. Degassing: 9 Cycles @ 1.5KV

  13. Calibration: H2 Calibration Factor

  14. Calibration: N2 Calibration Factor

  15. Calibration: N2 2nd set of data Calibration Factor

  16. Degassing: 30 Cycles @ 0.35 KV

  17. CURRENT!!!!!

  18. Desorption Yield

  19. Desorption Yield • 15 RGA Cycles for background Signal + biassing of the sample • 15 RGA Cycles with the filament switched on • filament + sample degassing

  20. Desorption Yield • switch on the filament • 15 RGA Cycles for background pressure • 15 RGA Cycles with the sample biased

  21. Desorption Yield @ 0.35 KV

  22. Desorption Yield @ 10 KV

  23. N2 calibration

  24. Energy correlation

  25. Desorption Mechanisms

  26. Desorption Mechanisms

  27. Stopping power and Range

  28. Stopping power and Range

  29. Energy correlation

  30. Circuit 35 KV V 2-3 A A +15 V V A

  31. Extra-electron source

  32. Degassing @ 5 KV

  33. Improvements

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