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TSV. Thru-silicon vias. Ranganathan. Ranganathan. TSV: front and back versions. Arthur Keigler, Kathy O'Donnell, Zhenqiu Liu, and Bill Wu, NEXX Systems, Billerica, Mass.; John Trezza, Cubic Wafer, Austin, Texas -- Semiconductor International, 8/1/2007. Ranganathan. Profile control.
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TSV Thru-silicon vias
Arthur Keigler, Kathy O'Donnell, Zhenqiu Liu, and Bill Wu, NEXX Systems, Billerica, Mass.; John Trezza, Cubic Wafer, Austin, Texas -- Semiconductor International, 8/1/2007
Profile control Ranganathan