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Unified HEROS Code for Heat and Ion Implantation Profile Calculations under IFE Conditions

Unified HEROS Code for Heat and Ion Implantation Profile Calculations under IFE Conditions. Qiyang Hu 1 , Jake Blanchard 2 , Shahram Sharafat 1 , Nasr Ghoniem 1 1 : UCLA 2 : UWM. Models and applications (current approach). HAPL Chamber Analyses. Thermo-structural Models.

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Ion spectral perkin - PowerPoint PPT Presentation

Unified HEROS Code for Heat and Ion Implantation Profile Calculations under IFE Conditions