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Monolithic stage - PowerPoint PPT Presentation

Application oriented micro-nano electro mechanical systems Masayoshi Esashi

Application oriented micro-nano electro mechanical systems Masayoshi Esashi New Industry Creation Hatchery Center , Tohoku University, Sendai , Japan ?. Introduction ?. Electrostatically levitated rotational gyroscope ?. MEMS relay ?. Multi probe data storage

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Monolithic stage - PowerPoint PPT Presentation

Application oriented micro-nano electro mechanical systems Masayoshi Esashi