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Electron beam lithography (EBL)

Electron beam lithography (EBL). Overview and resolution limit. Electron source (thermionic and field emission). Electron optics (electrostatic and magnetic lens). Aberrations (spherical, chromatic, diffraction, astigmation). EBL systems (raster/vector scan, round/shaped beam).

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Work func tion ev - PowerPoint PPT Presentation

Electron beam lithography (EBL)