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Grand Challenges for Autonomous Mobile Microrobots

Grand Challenges for Autonomous Mobile Microrobots. Sarah Bergbreiter Dr. Kris Pister Berkeley Sensor and Actuator Center, UC Berkeley. What is an Autonomous Mobile Microrobot?. Size Total size on order of millimeters Mobility Should be able to move around a given environment

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Grand Challenges for Autonomous Mobile Microrobots

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  1. Grand Challenges for Autonomous Mobile Microrobots Sarah Bergbreiter Dr. Kris Pister Berkeley Sensor and Actuator Center, UC Berkeley

  2. What is an Autonomous Mobile Microrobot? • Size • Total size on order of millimeters • Mobility • Should be able to move around a given environment • Speeds of mm/sec • Autonomous • Power and control on-board • Communication between robots (?)

  3. Applications for Autonomous Mobile Microrobots • Mobile Sensor Networks • Monitoring/surveillance • Search and rescue • Cooperative Construction • Assisted assembly • Sacrificial assembly

  4. Ebefors, et al, 1999 Seiko, 1992 Hollar, et al, 2002 Yeh, 1995-2001 Sandia, 2001 Donald, et al, 2006 Previous Microrobots

  5. 1mm CCRs 1mm Solar Cell Array XL CMOS IC Smart Dust (Warneke, et al. Sensors 2002) Microrobots (Hollar, Flynn, Pister. MEMS 2002) COTS Dust (Hill, et al. ACM OS Review 2000) CotsBots (Bergbreiter, Pister. IROS 2003) Making Silicon Move Remove Legs Add Robot Body

  6. How Close Are We?

  7. Solar Powered 10mg Silicon Robot

  8. 1mm Why Is This So Hard? Power Mechanisms Integration Locomotion Actuators

  9. 1mm Challenge 1: Locomotion Locomotion

  10. Challenge 1: Locomotion • Interaction with Environment • Obstacles are large • Reduce Complexity • Difficult to actuate out of plane • Difficult to fabricate bearings • Efficiency • Internal v. external work

  11. Hopping Trajectory, Mass = 15mg, Angle = 60deg height (cm) distance (cm) Locomotion: Jumping

  12. Locomotion: Comparison • What time and energy is required to move a microrobot 1 m and what size obstacles can these robots overcome? S. Hollar, "A Solar-Powered, Milligram Prototype Robot from a Three-Chip Process," in Mechanical Engineering: University of California, Berkeley, 2003. T. Ebefors, J. U. Mattsson, E. Kalvesten, and G. Stemme, "A walking silicon microrobot," presented at International Conference on Sensors and Actuators (Transducers '99), Sendai, Japan, 1999. http://asl.epfl.ch/index.html?content=research/systems/Alice/alice.php

  13. Locomotion: Comparison • What time and energy is required to move a microrobot 1 m and what size obstacles can these robots overcome? A. Lipp, H. Wolf, and F.O. Lehmann., “Walking on inclines: energetics of locomotion in the ant Camponotus," Journal of Experimental Biology 208(4) Feb 2005, 707-19. S. Hollar, "A Solar-Powered, Milligram Prototype Robot from a Three-Chip Process," in Mechanical Engineering: University of California, Berkeley, 2003. T. Ebefors, J. U. Mattsson, E. Kalvesten, and G. Stemme, "A walking silicon microrobot," presented at International Conference on Sensors and Actuators (Transducers '99), Sendai, Japan, 1999. http://asl.epfl.ch/index.html?content=research/systems/Alice/alice.php

  14. 1mm Challenge 2: Actuators Actuators

  15. Low Power Small Size Force/Displacement Efficient Simple Fabrication and Integration Power Supply Compatibility Robust Challenge 2: Actuators Yeh, 2001 Lindsay, 2001 Kladitis, 2000 Pelrine, 2002 Wood, 2005 Lu, 2003

  16. k + - d V F t l Actuators: Electrostatic Inchworm Motors • High force at low power and moderate voltage • Accumulate short displacements for long throw • Fabricated in single mask process • Hollar inchworm designed for 500 mN of force and 256 mm of travel in ~ 2.8 mm2

  17. Electrostatic Inchworm Motor

  18. 1mm Challenge 3: Mechanisms Mechanisms

  19. Challenge 3: Mechanisms • Simple Fabrication • Process Complexity • Batch v. Serial • Efficient • Friction • Robust • Matching to Actuators Hollar, et al, 2002 Wood, et al, 2003

  20. 2 months in the microlab, but very pretty! Mechanisms: Silicon

  21. Orthogrippers fabricated in same process Parts rotated 90o and assembled out of plane Thermal actuators and rotation stages have been assembled Clamp w/o Assembled Part Clamp w/ Assembled Part Mechanisms: Assembly

  22. 1mm Challenge 4: Power Power

  23. Small Mass and Volume Compatible with Actuators Any converter circuitry should be included Simple Integration Challenge 4: Power Cymbet Bellew, 2003 Roundy, 2003 Nielsen, 2003

  24. Use isolation trenches to stack solar cells for higher voltages 0.5 – 100V demonstrated 10-14% efficiency Small Size Chip area: 3.6 x 1.8 mm2 Chip mass: 2.3 mg Complex Process Power: Solar Cells

  25. 1mm Challenge 5: Integration Integration

  26. Need to connect all of the pieces Actuators, control, power supply, sensors, radio… Robust Compatibility Serial v. Batch Challenge 5: Integration Srinivasan, 2001 Last, 2006

  27. What Next?

  28. Thanks!

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