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C08: Effect of on-chip magnetic shielding for TES microcalorimeters

Cross Section. Au Abs. a. b. Ti / Au. Nb. SiO 2 membrane. Al. SiNx membrane. Si. C08: Effect of on-chip magnetic shielding for TES microcalorimeters. SII-182. a. TES calorimeter needs a magnetic shield to work stably. 350 µm. b.

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C08: Effect of on-chip magnetic shielding for TES microcalorimeters

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  1. Cross Section Au Abs. a b Ti/Au Nb SiO2 membrane Al SiNxmembrane Si C08: Effect of on-chip magnetic shielding for TES microcalorimeters SII-182 a TES calorimeter needs a magnetic shieldto work stably. 350 µm b Y. Ishisaki, H. Kurabayashi, A. Hoshino, T. Ohashi, T. Yoshino 2), T. Hagihara 2), K. Mitsuda 2),, K. Tanaka 3) Department of Physics, Tokyo Metropolitan Univ. 2) ISAS/JAXA, 3) SII Nano-Technology Current On-chip Mag shield

  2. SII-14b (no shield) SII-14b 0mT 6mT SII-182 0mT SII-182 On-chip shield 26mT 300mT 100mT 300mT

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