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Top view of “Kraken” chamber. BLIS with axes of freedom. Alignment HeNe system. e beam. Breakdown/phosphor camera. Kraken OTR lens/camera. Front view (walkway side) of “Kraken” chamber. Regular 6” viewports. Back side of “Kraken” chamber (wall side). TPX or Z-cut quartz viewport.
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Top view of “Kraken” chamber BLIS with axes of freedom Alignment HeNe system e beam Breakdown/phosphor camera Kraken OTR lens/camera
Front view (walkway side) of “Kraken” chamber Regular 6” viewports
Back side of “Kraken” chamber (wall side) TPX or Z-cut quartz viewport 6” to 2.75” reducer