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Modular Cleanrooms, Inc.

Modular Cleanrooms, Inc. Silicon wafer fabrication. Taken from www.egg.or.jp/MSIL/english/index-e.html. Silicon wafer fabrication – slicing and polishing. Taken from www.egg.or.jp/MSIL/english/index-e.html. LPCVD Systems. IBM 7-Level Cu Metallization. What is a Microswitch?.

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Modular Cleanrooms, Inc.

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  1. Modular Cleanrooms, Inc.

  2. Silicon wafer fabrication • Taken from www.egg.or.jp/MSIL/english/index-e.html

  3. Silicon wafer fabrication – slicing and polishing • Taken from www.egg.or.jp/MSIL/english/index-e.html

  4. LPCVD Systems

  5. IBM 7-Level Cu Metallization

  6. What is a Microswitch? Surface Micromachined 5-500 Micron Size 5-300 V Actuation

  7. 1mm Drive 0.01Å Sense MEMS Gyroscope Chip J. Seeger, X. Jiang, and B. Boser

  8. Single chip six-degree-of-freedom inertial measurement unit (uIMU) designed by IMI principals and fabricated by Sandia National Laboratories

  9. TI Digital Micromirror Device

  10. Micromachining Ink Jet Nozzles Microtechnology group, TU Berlin

  11. Gene chips, proteomics arrays.

  12. NEMS: TOWARD PHONON COUNTING: Quantum Limit of Heat Flow. Roukes Group Cal Tech Tito

  13. Biological Nanomotor

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