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Cleanroom design Clenroom behaviour

Slide 2. Outline. IntroductionWhy do we need cleanroomsBasic requirements for cleanroomsEarlierPresentFutureMain Application Fields for CleanroomsMicroelectronicsBiotechnology and related fieldsOther fields: Microtechnology, electronics, hospital care, etcBasic Structures and Components of CleanroomsClean airStable Room TemperatureClean waterChemicals including gasesVibration dampingEquipments with

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Cleanroom design Clenroom behaviour

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    1. Cleanroom design Clenroom behaviour

    2. Slide 2

    3. Slide 3 A typical cleanroom

    4. Slide 4 Introduction Why do we need cleanrooms Basic requirements for cleanrooms Earlier: Clean air, stable temperature, stable humidity, clean water, gases and chemicals, lighting, processing equipment, inspection and test equipment, room infrastructure, etc. High investments and operating costs. Present: As earlier at better performance + vibration control Investments and operating costs very high Future: You would not want know: Main Application Fields for Cleanrooms Microelectronics Biotechnology and related fields Other fields: Microtechnology, electronics, hospital care, etc

    5. Slide 5 Basic Structures and Components of Cleanrooms Clean air Overpressure Filters HEPA ( High Efficiency Particulate Air) filters Humidity Control Stable Room Temperature: 22°C (±2°C) Clean Water: Filtered and deionized water Chemicals Equipment with “infrastructure” Aligners Ovens etc Working in Cleanrooms: Best Practices

    6. Slide 6 Clean room classification

    7. Slide 7 Sizes

    8. Slide 8 Utilities (”infra-structure”)

    9. Slide 9 Clean water

    10. Slide 10 Laminar Air Flow

    11. Slide 11 HEPA (High Efficiency Particulate Air) filter

    12. Slide 12 Mechanical Vibration Control Submicron processing needs vibration control

    13. Slide 13 On-site vibration measurement spectra of the stepper (g=386.4 in./sec2).

    14. Slide 14

    15. Slide 15 Entering cleanroom Leave jackets, bags and outside shoes in the first room Indoor footwear allowed in the change room (or use blue covers)

    16. Slide 16 Dressing in the cleanroom New garment suits available to all users Hang such that it does not touch the ground Full cleanroom suit includes: Head cover Body suit Footwear Gloves (latex gloves in lith room, protective in main room) Eye protection Sign-in whiteboard Mark your ”precense” using black magnet If you are going to use chemicals/etching add red magnet

    17. Slide 17 Emergency facilities

    18. Slide 18 Working in Cleanrooms: Best Practices: Cleanroom workers are “dust generators” Cleanroom gowning: Bunny suit etc. Dos and Don’ts Possible health hazards should be taken seriously (but a good job for people with breathing air related health problems, like asthma.

    19. Slide 19 Conclusions Cleanrooms are necessary for microtechnology production and prototyping Cleanrooms are complex structures Cleanrooms are very expensive to build and operate Cleanroom work is a skill that needs to be learned. Requirements for cleanrooms getting tougher and tougher as microtechnologies mature further

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