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Recent Progress with Atomic Layer Deposition

Recent Progress with Atomic Layer Deposition. T.Proslier 1,2 , J.Norem 1 M.Pellin 3 , J.Zasadzinski 2 , J.Elam 4 , P.Kneisel 5 , R.Rimmer 5 , L.Cooley 6 , C.Antoine 7 High Energy Physics, ANL Department of Biological, Chemical and Physical Sciences, IIT Materials Science Division, ANL

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J lab cavity1 - PowerPoint PPT Presentation

Recent Progress with Atomic Layer Deposition